Functionality of Diode Ion Pumps

Funktionsweise von Dioden-IonengetterpumpenA diode ion pump consists of one or more pumping elements, the corresponding external permanent magnets, and the pump housing. The pumping elements are the parts of the pump doing the actual pumping work. Every pumping element consists of 2 cathode plates and an anode element, simply called anode.
The anode is made up of numerous short metal cylinders which are welded together like honeycombs. Each cylinder is the center of a Penning cell. The more cells an anode has, the higher is the pumping speed of the pumping element. The anode is located between the two cathode plates, which are separated from the anode by a gap.
This gap is large enough for the inflow of gas. Anode and cathode are connected tightly and are electrically isolated by ceramic insulators. They form the pumping element. One or more pumping elements are built into the pump housing. The pump housing ist a small vacuum chamber that has pockets to hold these pumping elements.The permanent magnets are placed onto the pockets from the outside. This completes the assembly.

For the function of an IGP three processes are essential:

1. Electron cloud development
2. Gas molecule ionisation
3. Ion impact

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