Titanium Sublimation Pumps

Titanium Sublimation Pumps (TSP) are often used in combination with ion getter pumps, because they have a particularly high pumping speed for some gases. In a TSP, filaments of titanium alloy are heated electrically until the titanium sublimates from the surface of the filaments into the vacuum.

The sublimed titanium precipitates on the surrounding surfaces and forms a thin layer. This layer has a high pumping speed for reactive gases, which are either forming a chemical compound with the layer or being absorbed. With the increasing coverage by these gases, the pumping speed decreases again.

By cooling the surfaces with water or liquid nitrogen, the pumping speed can be further increased considerably. Titan sublimation pumps are particularly suitable for gases such as H2O, CO, CO2, and O2. Using nitrogen cooling, H2 and N2 are also pumped very effectively.