Partial Pressure Measurement

Gases and gas mixtures play a fundamental role in many processes in research, development and production. In many applications, e. g. CVD and plasma processes or the vacuum analysis of UHV systems, information about the total pressure is not sufficient, because in these processes detection and documentation of specific molecular species is required.

In such cases, partial pressure measurement is used to monitor, control and optimize the experimental procedures. Quadrupole Mass Spectrometers (QMS) proved as reliable tools for process technology during the last few decades and are often used for this task. They improved steadily over the years and can now be used efficiently in all areas of research and production.

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