Sealing Materials

Different sealing materials are used in vacuum applications. The selection of the appropriate material depends on the required characteristics, especially with respect to:

  • Ultimate pressure
  • Temperature
  • Outgassing behaviour
  • Gas permeation
  • Chemical resistance
  • Radiation resistance

KF and ISO components are usually seales with O-rings of NBR and FKM. CF and QCF components, however, require flat gasket of oxygen-
free copper by default. Other materials may be used for special applications.

Elastomer Seals

Material
NBR
(Acrylnitril-Butadien-
Kautschuk)
FKM
(Fluor-Kautschuk)
FFKM
(Perfluor-
Kautschuk)
PTFE
(Polytetra-fluorethylen)

MVQ
(Methyl-Vinil-
Silicon-
Kautschuk)

Flange system
KF, ISO KF, ISO, CF, QCF  KF, ISO  KF  KF, ISO
Design O-ring  O-ring or
flat seal
 O-ring  edge seal O-ring
Comment standard material
for KF and ISO
 standard material
for KF and ISO
 application mainly in
semiconductor
technology
high pressing forces,
clamp chains or
special clamps
standard material
for KF and ISO

Metal Seals

Material Aluminium Copper (OFHC)
Flange system
KF, ISO, CF  CF, QCF
Design  edge seal, flat gasket flat gasket
You are here: Home Products Standard Components Materials Sealing Materials