Product Overview

The combination vacuum gauges by VACOM determine the pressure between atmosphere and ultra-high vacuum. For measurements in range from atmospheric pressures to fine vacuum, heat loss vacuum gauges (Pirani) are used. At pressures from fine to ultra-high vacuum, a hot cathode (Bayard-Alpert) is used. The combination vacuum gauge switches between the two measurement principles automatically. This way, pressures over 13 decades can be determined with only one measuring instrument. With the integrated electronics, RS232, RS485, optional Profibus interfaces as well as an analog output the necessary compatibility is ensured.

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BARION® atm BARION® smart BARION® smartF
BARION atm Baffle vorschau BARION® smart BARION® smartF
Trouble-free process control, compact and robust construction, large interface selection.We recommend the use of a baffle to prevent process-induced contaminations. Innovative in-situ bakeable wide range gauge consisting of hot cathode and Pirani. Transducer (VaX linkB) or conventional cable usage (VaX) possible. Passive wide range gauge consisting of hot cathode and Pirani. Transducer (VaX linkB) or conventional cable usage (VaX) possible.
Measurement range  [mbar]: 5 · 10-10 bis 1000 1 · 10-11 ... 1000 (in operation with VaX) 1 · 10-11 ... 1000 (in operation with VaX)
Bakeout temperature [°C]: 50 (at chamber flange)

200 (in operation with VaX + cable)        150 at chamber flange (in operation with VaX linkB)

200 (in operation with VaX + cable)     150 at chamber flange (in operation with VaX linkB)
Operating temperature [°C]: 10 ... 50 200°C (in operation with VaX + cable)
50°C (in operation with VaX linkB)
200°C (in operation with VaX + cable)
50°C (in operation with VaX linkB)
Vacuum connection: KF16 / CF40 KF16 / KF 25 / CF40 CF40
Filaments: 2x iridium, yttria coated (not replaceable) 2x iridium, yttria coated (not replaceable) 2x iridium, yttria coated (replaceable)
Interfaces: RS232, Analog (0 bis 10 V, 0 bis 20 mA), Profibus - -
Set points: 2 -  -
Cable:
(X = cable length)
BASL CABLE-VAX-BARIONBPS-X
Data sheet:   Download Data Sheet Download Data Sheet Download Data Sheet 

 

Compatible electronic controls (useful for sensors): VMG VAX Vacuum Explorer VaX linkB
  VMG VAX Vacuum Explorer VaX linkB
Number/type of sensors: BARION® atm

BARION® smart, BARION® smartF Optional: BARION® atm

BARION® smart, BARION® smartF
Interfaces: RS232 Main device:
    Back: 1x RJ45 (RS485 and RS232), 1x power supply
    Front: 1x USB-data transfer (USB-b),
           1x USB charging (USB-a),
Hot cathode module (back):
1x D-Sub mixed for passive BARION® sensors, 11 pins
Active sensor module (back):
3x RJ45 for active sensors
Data I/O: D-Sub, 9 pin with RS232, analog (0…10 V, 0…20 mA, 4…20 mA)
Gauge control: special connector for BARION® gauges, 11 pin
Set points: 2 - 1x relais (floating, max. 30 V/0.5 A)
1x open collector (OC) (max. 30 V/ 0.5 A)
Data sheet:   Download Data Sheet Download Data Sheet Download Data Sheet


Further information about combination vacuum gauges and physical principles can be found here.