Bakeout, Assembly and Packaging in Cleanroom
Bakeout of Vacuum Chambers
Furthermore, we have the opportunity to bakeout complete vacuum chambers up to 250 °C with a diameter up to 900 mm and a height up to 1400 mm. At the same time, we can specify the outgassing by means of mass spectrometry.
By default, the complete bakeout and outgassing process is recorded up to a atomic mass number of 200 amu. The residual gas spectrum can be offered as protocol on request.
You can find further information on bakeout in vacuum and residual gas analysis under the category Service.
Assembly of Components in Cleanroom
VACOM offers the possibility to assemble units with high demands on a low particle emission under cleanroom conditions. Workstations of ISO class 5 are available in which even large assemblies can be fitted.
In addition, we have special workstations of ISO class 1 available which are used for processing and fitting assemblies up to a maximum weight of 25 kg.
The cleanroom quality is regularly checked and recorded using particle measurements.
Packaging in Cleanroom
All products are packed after the cleaning process to preserve the cleanliness achieved during cleaning. The packaging of the components is executed in a cleanroom of the appropriate ISO class - depending on the required particle specification. We use packaging material with low outgassing and particle generation. Components which need cleanroom suitable packaging are packed twice in special foil impermeable to moisture and afterwards PE foil applicable for cleanrooms. This allows the storage of the components for more than a year without any loss in the quality of purity.
Cleanroom Primary Packaging:
- Protection against particle contamination
- Protection against water and hydrocarbons
- Vacuum packaging or packaging flooded with nitrogen as standard possible