Qualified Residual Gas Analysis

Qualified Residual Gas AnalysisWe are able to verify the desired cleaning result and also quantify and document the outgassing behaviour with our residual gas analysis systems.

We have our own RGA service area. We offer qualified outgassing measurement by means of quantitative and qualitative residual gas analysis. The residual gas analysis serves as standardized quality control of the produced low-outgassing  vacuum components (small components up to complete vacuum chambers) as well as verification of provided products. The measurements are carried out with a partial pressure of up to 2  •  10-14  mbar  and a mass number up to 300 amu. The highly sensitive measurement setups allow the detection of smallest contaminations to serve highest demands on the cleanliness of vacuum components and chambers.

We offer the residual gas analysis also as service at the customer's site.