Cleaning and Surface Treatment in the Cleanroom

Cleaning in the ultrasonic cleaning lineFor a best possible surface refinement a thorough cleaning and optimal surface treatment of the vacuum components under cleanroom conditions is required.
Only this way a better corrosion resistance and a lower wear of highly stressed components can be ensured.

Electropolishing

ElectropolishingElectropolishing is a standard method which we use to refine the surface of components. It is carried out in the cleanroom area.
Well tested processes ensure that besides deburring, smoothing and polishing absolutely clean and passivated metal surfaces with low surface desorption are achieved.


Component after electropolishingAt all times during the whole process chain of surface treatment and refinement of components the protection of sealing surfaces and cutting edges as well as the minimization of particle contamination is ensured.
Electropolished vacuum chambers and components are characterized by a better corrosion resistance and a low wear of highly stressed components.

 

Electropolishing in the cleanroom

  • Material: stainless steel
  • Machinable dimensions: L = 510 mm, B = 435 mm, H = 350 mm, tubes up to diameter 50 mm und L = 600 mm, other dimensions on request
  • Max. surface: 26 dm2, larger surfaces on request

Results:

  • Deburred
  • Sealing surfaces protected
  • H2-reduced surfaces
  • Corrosion resistant surfaces
  • Minimized microroughness
  • Particle reduces
  • Operational residues removed

At all times during the whole process chain of surface treatment and refinement of components the protection of sealing surfaces and cutting edges as well as the minimization of particle contamination is ensured.

Electropolished components are characterized by a better corrosion resistance and a low wear of highly stressed components.

Cleaning in the Ultrasonic Cleaning Line

Ultrasonic Cleaning LineWet cleaning in the cleanroom

The cleaning process and the used cleaning agents are optimized for the processed materials and geometries of the components.


  • Cleanroom: 800 m2
  • Cleanroom class ISO 7 and better
  • Manually to fully automated
  • Automated process documentation possible
  • Miscellaneous ultrasonic frequencies available
  • Use of material-specific proven and biodegradable cleaners
  • Cleaning line with conductance and pH value control
  • Contamination with zinc, tin, indium and lead is debarred
  • Fully automated cleaning of components with dimensions from 1 to 1100 mm, other dimensions on request
  • Cleaning to a gross weight of 250 kg
  • Comprehensive process documentation and filing
  • Subsequent to the cleaning follow the logistics according to specification directly to the adjacent cleanrooms or to packing and the automated small-parts warehouse
  • Adjusted cleaning processes are available for following materials:

– Stainless steel
– Aluminium
– Copper
– Ceramics
– Glass

  • Testing of the cleaning results according to  quality control plan

We gladly advice you to achieve an optimal and to your specification adjusted cleaning effect.

Ozone Cleaning

Ozone cleaningThe removal of hydrocarbons (HC) by bakeout for tubes with a ratio of diameter to length greater than 1:50 is only possible to a limited extent. The gaseous hydrocarbons cannot leave a long tube due to physical reasons.

This problem can be resolved by purging with ozone also referred to as ozone cleaning. The components are connected to an ozone generator after the conventional cleaning. The ozone causes scission and conversion of the unwished HC contamination into easily purgeable gases like water vapour and CO2. So it is possible to prepare also long tube assemblies ultrapure.

This procedure is appropriate for tube assemblies in pure gas technology which are applied e. g. in CVD or semiconductor processes: labyrinthine constructed components with rough edges, gaps and sophisticated geometries. The assemblies are delivered closed and filled with ultra pure nitrogen.

Bakeout of Vacuum Chambers

Bakeout of vacuum chambersYou want to know how your vacuum chamber / assembly behaves in operation and determine the outgassing behaviour? We provide you the opportunity to bakeout complete vacuum chambers and to determine the outgassing and the outgassing rate by means of mass spectroscopy.

 

  • Vacuum UCV
  • Temperature to 250 °C
  • Components / assemblies with a diameter to 900 mm and a height to 1400 mm
  • The vacuum chamber / assembly will be evacuated and heated according to the instructions. Atmosphere-sided the chamber is on air.
  • The whole bakeout and outgassing process is documented and recorded to mass number 200 amu.

We gladly advice you in order to provide an optimal  evaluation of your components with matched parameters.

Bakeout in the Vacuum Oven

Vacuum ovenVacuum components can be bake out to achieve a further reduction of the outgassing rate. The desorption and diffusion rates of all materials are highly temperature dependent. Therefore the material surfaces are released from adsorbed particles at high temperatures (e. g. 300 °C) while the diffusion of molecules in the material will be accelerated. Thus the bake out reduces the outgassing rate during the future operation under low pressures.

Baked stainless steel achieves the following outgassing rates:
2 • 10-10 mbar l/s*cm-2 for water
2 • 10-12 mbar l/s*cm-2 for highly volatile organic compounds
1,5 • 10-13 mbar l/s*cm-2 for low-volatile organic compounds

Process parameters during bakeout of components in the vacuum oven:

  • Vacuum to 10-5 mbar
  • Temperature to 300 °C
  • Capacity to 420 x 480 x 500 mm component size

The molecular constituents of the outgassing can be determined simultaneously during bakeout.

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