Vacuum Specific Measurements

To determine the leak rate of your vacuum system, the outgassing behaviour or the particle load of your vacuum components, VACOM offers various vaccum specific measurements.

Leak Test for Vacuum

Leak Test for VacuumWe provide helium leak tests of all common designs and assemblies. We detect and document leak rates to
1 • 10-9 mbar l/s, 1 • 10-10 mbar l/s and 5 • 10-11 mbar l/s. the lower the leak rate the higher the effort. A leak test printout is part of the service agreement.

The leak test of cleanroom compatible cleaned components is executed in cleanroom environment. Inspection stations are available for cleanroom class ISO 7 and ISO 5 according to the specification of the components. Following the leak test we accomplish a black light inspection as standard practice in order to verify the sufficient absence of particles of the components’ surface and finally pack you components cleanroom compatible.

Leak Detection On-Site

Leaks as defined by vacuum technology can be gas, liquid or virtual leaks.

In case of tightness problems of facilities or in processes we can also execute leak tests in the pressure range from atmosphere to UHV on-site at your location if required.

With our mobile leak tester and mass spectrometer we are able:

  • to determine what type of leak it is.
  • to determine where the leak is situated.
  • discuss with you what is the best way to remedy the leak effectively.

Furthermore, we can provide you a mobile leak tester as loan unit on request. This device is immediately applicable after delivery, a manual will be attached. If you need helium and a spray pistol, we can provide that as well.

Vacuum Comparison Measurement – Calibration Service for Vacuum Gauges

Vacuum comparison measurementVacuum gauges are instruments which have to be controlled regularly according to DIN EN ISO 9001-2000.
We provide vacuum comparison measurements with DKD calibrated reference devices according to ISO 3567 independent of the instrument manufacturer. Our comparison measurement comprises in addition to the functional test the sensor calibration of your device at our factory calibration unit. The test report includes the traceability of the DKD calibrated reference measuring devices.

Reference measuring devices and pressure ranges:

  • Hot cathode ionisation gauge(Bayard-Alpert): 1 • 10-7...1 • 10-3 mbar (abs.)
  • Temperature controlled capacitance gauges: 1 • 10-4...0,1 mbar (abs.)
  • Temperature controlled capacitance gauges: 1...1000 mbar (abs.)

Qualitative and Quantitative Outgassing measurement of materials and assemblies

The evaluation of the outgassing behaviour of materials, components and assemblies is of essential importance for many modern technology processes. This includes on the one hand the basic classification of materials regarding their vacuum compatibility that depends both on the operating pressure and the prevailing temperatures.
On the other hand, measurements of the outgassing behaviour are a method of quality inspection for the performance of the cleaning of materials and components. Our measuring procedures are so sensitive that we can detect e. g. the contamination of a mounting glove with slight traces of skin oil on the mounted assembly.
We provide you outgassing measurements by qualitative and quantitative residual gas analysis (RGA). The measurement of outgassing rates [mbar l/s] covers the mass number range to 200 m/z (mass/load). Our highly sensitive measuring stations enable the detection of slightest contaminations by e. g. highly volatile and low-volatile organic compounds (45...100 m/z and 101...200 m/z) in order to provide for our customers with highest demands the requisite cleanliness of vacuum components and chambers. The lowest detection limit for the partial pressure is 5 • 10-14 mbar.

By repetition of the measurement we can ascertain if the outgassing behaviour of the materials is reversible or if the outgassing caused sustained modification of the material’s characteristics. A printout can be delivered for each measurement which contains the time-dependent outgassing rate of your assembly. We gladly process the evaluation of the measuring results and interpret the data in consultation with you.

Mass specific outgassing rates to 1 • 10-14 mbar l/s/cm2 can be detected by our residual gas analysis measuring stations. The detectability/analysability of the residual gas composition is decisively influenced by the surface relation between test objects and measuring instrument.
The calibration of the mass spectrometer is as essential as the appropriate selection and dimensioning of the pump und the correct adjustment of conductance values.

We have a wealth of experience to decide in advance whether the measurements let expect an evaluable result by comparing the lowest detection limit of our measuring station with the expected outgassing behaviour of your samples.
Our RGA measuring station are regularly maintained and calibrated according to strict guidelines in order to guarantee the high quality und measuring accuracy.

Determination of Pumping Speed according to DIN 28429

The determination of the pumping speed of new or also used ion getter pumps with a nominal pumping speed greater than 10 l/s can be executed on a pumping speed station according to DIN 28429 at our premises. The service includes the complete characterisation of the ion pump according to DIN 28429 and the record auf the measuring results. The process includes e.g. the determination of the pumping speed in the respective pressure range, the magnetic stray field and the max. power consumption. Nitrogen is used as the standard test gas, other test gases can be used on request.

Further Information

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