Bakeout in the Vacuum Oven

Vacuum ovenVacuum components can be bake out to achieve a further reduction of the outgassing rate. The desorption and diffusion rates of all materials are highly temperature dependent. Therefore the material surfaces are released from adsorbed particles at high temperatures (e. g. 300 °C) while the diffusion of molecules in the material will be accelerated. Thus the bake out reduces the outgassing rate during the future operation under low pressures.

Baked stainless steel achieves the following outgassing rates:
2 • 10-10 mbar l/s*cm-2 for water
2 • 10-12 mbar l/s*cm-2 for highly volatile organic compounds
1,5 • 10-13 mbar l/s*cm-2 for low-volatile organic compounds

Process parameters during bakeout of components in the vacuum oven:

  • Vacuum to 10-5 mbar
  • Temperature to 300 °C
  • Capacity to 420 x 480 x 500 mm component size

The molecular constituents of the outgassing can be determined simultaneously during bakeout.